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| 基于TDTR法测量单晶硅的声子平均自由程 |
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王新伟1,2,3,张中印4,孙方远2,熊雪2,3,陈哲2,姜玉雁2,唐大伟4
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(1.中国石油大学(华东)储运与建筑工程学院,山东青岛 266580;2.中国科学院工程热物理研究所,北京 100190;3.中国科学院大学,北京 100049;4.大连理工大学海洋能源利用与节能教育部重点实验室,辽宁大连 116024)
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| 摘要: |
| 基于时域抽运探测热反射法(TDTR),通过改变抽运光光斑直径和调制频率的方式控制被测样品单元体,探究不同温度下被测样品单元体内能量传递的声子弹道输运现象,进而间接获得单晶硅不同温度下的声子平均自由程(MFP)信息。结果表明:室温下单晶硅声子平均自由程可达1.5 μm;低温下单晶硅声子平均自由程增大,被测样品单元体传热尺寸效应增强,声子弹道输运的传热贡献增大,温度在80 K时MFP可达40 μm。对于采用TDTR法表征薄膜材料及其界面热阻时,要选择尽量大的抽运光光斑直径和尽量小的抽运光调制频率,以避免传热尺寸效应,减小声子弹道输运对测试值的影响。 |
| 关键词: 热导率 TDTR尺寸效应 弹道输运 声子平均自由程 |
| DOI：10.3969/j.issn.1673-5005.2019.03.017 |
| 分类号::TK 124 |
| 文献标识码:A |
| 基金项目:国家自然科学基金项目(51874333,3,51336009,7);中央高校基本科研业务费专项(19CX02014A) |
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| Measurement of phonon mean free path of single crystal silicon based on TDTR |
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WANG Xinwei1,2,3, ZHANG Zhongyin4, SUN Fangyuan2, XIONG Xue2,3, CHEN Zhe2, JIANG Yuyan2, TANG Dawei4
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(1.College of Pipeline and Civil Engineering in China University of Petroleum (East China), Qingdao 266580, China;2.Institute of Engineering Thermophysics, Chinese Academy of Sciences, Beijing 100190, China;3.University of Chinese Academy of Sciences, Beijing 100049, China;4.Key Laboratory of Ocean Energy Utilization and Energy Conservation of Ministry of Education, Dalian University of Technology, Dalian 116024, China)
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| Abstract: |
| The phonon ballistic transport phenomena were investigated in single crystal silicon under different temperatures by changing the pump beam diameter and modulation frequency based on the time-domain thermoreflectance(TDTR), and thus indirectly the mean free path(MFP) was obtained in silicon. It is found that the room temperature phonon MFP in silicon can reach 1.5 μm, and the phonon MFP in silicon increases at lower temperature, up to 40 μm at 80 K. The size effects in thermal conductivity are enhanced as the contribution of the phonon ballistic transport increases for the same sample under the lower temperature. When the film materials and their interfacial thermal resistance were characterized based on TDTR, it is better to choose the bigger pump beam diameter and smaller modulation frequency to avoid the size effect during heat transfer, and reduce the effect of the phonon ballistic transport on the measurement value. |
| Key words: thermal conductivity TDTR size effect ballistic transport phonon mean free path |
